Boise/Idaho, April 30, 2009 - A collaboration between AIXTRON and SemiLEDs has resulted in the successful fabrication of GaN-based blue LED chips on 6-inch sapphire wafers.
Not only were optical results encouraging but also the process is sufficiently close to production compatibility that the company should soon be able to reap the rewards from larger wafers.
Dr. Chuong Tran, President and COO of SemiLEDs, comments on the results: “Brightness and efficiency are encouraging, putting us a small step away from our existing and mature 4-inch sapphire MOCVD process. Using our patented Vertical LED on Metal Alloy for processing, the 18,000 power 1x1mm chips from a single 6 inch wafer show clear indications of added uniformity and higher yields. One of the contributing factors to yield enhancement is the significantly reduced edge area compared to the area equivalent of nine 2-inch wafers.”
The 6-inch sapphire wafer process is based on MOCVD and a series of follow-on device fabrication steps through to final test. Specifically, the LED structure was deposited on a 1000 µm thick 6-inch sapphire substrate using an AIX 2800G4 HT MOCVD reactor in the 6x6-inch configuration.
Dr. Christian Geng, General Manager Greater China of AIXTRON adds: “The process obviously works from A to Z. I expect that once the price of a 6-inch substrate becomes competitive many of our customers will convert their AIX 2800G4 HT systems from 42x2-inch to 6x6-inch configuration since it merely requires the exchange of the so-called Satellite Disks.”
SemiLEDs is a US based manufacturer of ultra-high bright LED chips with state of the art fabrication facilities in Hsinchu Science Park, Taiwan. SemiLEDs specializes in the development and manufacturing of vertical LED chips in blue(white), green and UV using a patented copper alloy base. This unique design allows for higher performance and longer lumen maintenance. SemiLEDs high power MvpLEDs™ deliver over 100lm/W in packaged formats. In December 2008 The World Economic Forum recognized SemiLEDs’ innovations with the 2009 Technology Pioneer Award.
AIXTRON AG is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials and more recently carbon nanostructures. Such components are used in display technology, signal and lighting technology, fiber communication networks, wireless and cell telephony applications, optical and electronic data storage, computer technology as well as a wide range of other high-tech applications. AIXTRON AG’s securities are listed on the Frankfurt Stock Exchange and, in form of American Depositary Shares (ADS), on the Global Market of the NASDAQ Stock Market, and are included in the TecDAX index, the NASDAQ Composite Index, the MSCI World Small Cap Index and the Nature Stock Index (NAI). Founded in 1983, the Company is headquartered in Aachen, Germany.